Keyphrases
Plasma Etcher
100%
Smooth Structures
50%
Tapered Sidewall
50%
Corporate Research
50%
Laser Optics
50%
Etching Process
50%
Deep Silicon Etching
50%
High Power Laser
50%
Saint Petersburg
50%
Sidewall Profile
50%
Plasma Etching
50%
THERM
50%
Laser Damage Threshold
50%
Department of Defense
25%
Thesis Projects
25%
Optical Materials
25%
Device Development
25%
Unique Capabilities
25%
Microstructure
25%
Educational Program
25%
Training Program
25%
PhD Programs
25%
Lithography
25%
Smooth Sidewalls
25%
Florida
25%
Silicon Oxide
25%
High Aspect
25%
Optics
25%
Antireflection Coating
25%
High Laser-induced Damage Threshold
25%
PhD Candidates
25%
Engineering
Side Wall
100%
Induced Damage
66%
Damage Threshold
66%
Microstructure
33%
Lithography
33%
Optoelectronic Device
33%
Engineering
33%
Silicon Oxide
33%
Department of Defense
33%
Etching Process
33%
Material Science
Antireflection Coating
50%
Silicon
50%
Plasma Etching
50%
Lithography
25%
Oxide Compound
25%
Optical Material
25%