Keyphrases
Ultrasonic Vibration Assisted Nanomachining
100%
3D Nanofabrication
100%
Nanofabrication
50%
Ultrasonic Vibration
33%
Cantilever
16%
High Rate Capability
16%
Research-based Education
16%
Process Innovation
16%
Solar Cell Devices
16%
Efficient Framework
16%
EUV Lithography
16%
Nanopositioning Stage
16%
2D Nanostructures
16%
Innovation Modeling
16%
Transformative Framework
16%
Nanoscale Features
16%
Nanomachines
16%
Nanotechnology
16%
Process Modeling
16%
High-throughput Methods
8%
K-12 Outreach
8%
3D Nanostructure
8%
Short Course
8%
Nanoelectronics
8%
Manufacturing Process
8%
Outreach Programs
8%
Photonic Devices
8%
Evolutionary
8%
Biomedical Devices
8%
Nanoscale Devices
8%
Process Instrumentation
8%
High Efficiency
8%
Electron Beam Lithography
8%
Manufacturing Systems
8%
High-throughput Fabrication
8%
Interdisciplinary Research
8%
Education Program
8%
Engineering
Nanofabrication Process
100%
Ultrasonics
100%
Nanoscale
40%
Nanomanufacturing System
40%
Biomedical Device
20%
Empirical Model
20%
Nanopositioning Stage
20%
Dimensional Range
20%
Manufacturing Process
20%
Solar Cell
20%
Beam Lithography
20%
Lithography
20%
Process Parameter
20%
Material Parameter
20%
Photonics
20%
Nanoelectronics
20%
Rate Capability
20%
Geometric Parameter
20%
Gas Fuel Manufacture
20%