MRI: Acquisition of an Electron Beam Lithography System for the NCSU Nanofabrication Facility

  • Ozturk, Mehmet M.C. (PI)
  • Soper, Steven S.A. (CoPI)
  • Riehn, Robert (CoPI)
  • Misra, Veena (CoPI)
  • Dickey, Michael D. (CoPI)

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Keyphrases

Engineering

Material Science